Alkali metal-containing polishing system and method

Inventors: David J. Schroeder, Jeffrey P. Chamberlain, Brian L. Mueller

Provisional Application Expired

	Code	Description	Pages	PDF
2001-01-16	`TRNA`	Transmittal of New Application	1	View
2001-01-16	`ADS`	Application Data Sheet	2	View
2001-01-16	`SPEC`	Specification	13	View
2001-01-16	`CLM`	Claims	5	View
2001-01-16	`ABST`	Abstract	1	View

Inventors

David J. Schroeder Aurora, IL

Jeffrey P. Chamberlain Aurora, IL

Brian L. Mueller Chandler, AZ

Attorneys & Agents of Record

THOMAS OMHOLT Reg. 37052 Agent · CABOT MICROELECTRONICS CORPORATION

BRIAN SZYMANSKI Reg. 39523 Attorney · ENGTEGRIS, INC.

SOMMER SKEPS Reg. 83192 Attorney · ENTEGRIS INC.

NIDHI KISSOON Reg. 69108 Attorney · INTERNATIONAL BUSINESS MACHINES, IBM

ERIC NIELSON Reg. 72825 Attorney · ENTEGRIS

MEGAN URRUTIA Reg. 77893 Agent

CATHERINE GATES Reg. 51132 Agent · ENTEGRIS

ERIKA SINGLETON Reg. 52368 Attorney · CABOT MICROELECTRONICS LEGAL DEPARTMENT

COLIN DURHAM Reg. 52843 Attorney · ENTEGRIS, INC.

SAMUEL BLIESNER Reg. 81591 Agent · ENTEGRIS, INC.

Prosecution

CABOT MICROELECTRONICS CORPORATION

from SCHROEDER, DAVID J., MUELLER, BRIAN L., CHAMBERLAIN, JEFFREY P.

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2001-04-23

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