IP Library Patent Application 60276316
Patent Application Provisional
App. No. 60/276,316 · Confirmation No. 6560

Multi-wavelength optical monitoring of thin film deposition thickness

Provisional Application Expired
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Code Description Pages PDF
2001-03-16 TRNA Transmittal of New Application 3 View
2001-03-16 SPEC Specification 26 View
2001-03-16 CLM Claims 6 View
2001-03-16 DRW Drawings-only black and white line drawings 1 View
2001-03-16 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
60/276,316
Filed
2001-03-16