Patent Application
Provisional
App. No. 60/276,316
· Confirmation No. 6560
Multi-wavelength optical monitoring of thin film deposition thickness
Provisional Application Expired
Inventors
Rance Morgan Fortenberry
Santa Rose, CA
Loren Stokes
Santa Rose, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 22910
- Docket No.
- 04995.00065
- Confirmation No.
- 6560
Child
Claims priority from a provisional application
→
App. 10/096,292
· US 6,798,553
Filed 2002-03-12
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/095,420
Filed 2002-03-12
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 10/096,003
Filed 2002-03-12
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 10/096,389
· US 6,658,172
Filed 2002-03-12
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 10/717,184
Filed 2003-11-18
· Abandoned -- Incomplete Application (Pre-examination)
Child
Claims priority from a provisional application
→
App. 10/096,002
Filed 2002-03-12
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 10/096,533
Filed 2002-03-12
· Abandoned -- Failure to Respond to an Office Action
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-07-17
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-19
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Quick Facts
- App. No.
- 60/276,316
- Filed
- 2001-03-16
External Links