IP Library › Patent Application 60277818
Patent Application Provisional
App. No. 60/277,818 · Confirmation No. 4910

Method and apparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measurement system

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2001-03-21 TRNA Transmittal of New Application 3 View
2001-03-21 SPEC Specification 19 View
2001-03-21 CLM Claims 4 View
2001-03-21 ABST Abstract 1 View
2001-03-21 DRW Drawings-only black and white line drawings 6 View
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Quick Facts
App. No.
60/277,818
Filed
2001-03-21