IP Library › Patent Application 60281446
Patent Application Provisional
App. No. 60/281,446 · Confirmation No. 4265

Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays

Provisional Application Expired
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 Code Description Pages PDF
2001-04-03 TRNA Transmittal of New Application 3 View
2001-04-03 SPEC Specification 13 View
2001-04-03 CLM Claims 7 View
2001-04-03 ABST Abstract 1 View
2001-04-03 OATH Oath or Declaration filed 5 View
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Quick Facts
App. No.
60/281,446
Filed
2001-04-03