CMP polishing composition for semiconductor devices containing a sulfonate surfactant

Inventors: Wesley D. Costas, Tirthankar Ghosh, Jinru Bian, Karel-Anne Valentine

Provisional Application Expired

	Code	Description	Pages	PDF
2001-04-12	`TRNA`	Transmittal of New Application	1	View
2001-04-12	`SPEC`	Specification	14	View
2001-04-12	`CLM`	Claims	2	View
2001-04-12	`ABST`	Abstract	1	View

Inventors

Wesley D. Costas Bear, DE

Tirthankar Ghosh Oreland, PA

Jinru Bian Newark, DE

Karel-Anne Valentine Elkton, MD

Attorneys & Agents of Record

GERALD KITA Reg. 24125 Attorney

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