IP Library Patent Application 60283515
Patent Application Provisional
App. No. 60/283,515 · Confirmation No. 2601

Apparatus and method for epitaxial sputter deposition of epilayers and high quality films

Inventor: Roman Christyakov
Provisional Application Expired
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Code Description Pages PDF
2001-04-11 TRNA Transmittal of New Application 2 View
2001-04-11 SPEC Specification 4 View
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Quick Facts
App. No.
60/283,515
Filed
2001-04-11