IP Library › Patent Application 60283521
Patent Application Provisional
App. No. 60/283,521 · Confirmation No. 2616

Edge gripper for 300MM wafer handling

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2001-04-11 TRNA Transmittal of New Application 1 View
2001-04-11 SPEC Specification 1 View
2001-04-11 DRW Drawings-only black and white line drawings 1 View
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Quick Facts
App. No.
60/283,521
Filed
2001-04-11