Method and apparatus for controlling sputter deposited film profiles on topographic features

Provisional Application Expired

⬇ PDF		Code	Description	Pages	PDF
	2001-04-19	`TRNA`	Transmittal of New Application	3	View
	2001-04-19	`SPEC`	Specification	29	View

Inventors

Alan V. Hayes Centerport, NY

Hari Hedge Flushing, NY

Boris Druz Brooklyn, NY

Victor Kanarov Bellmore, NY

Adrian J. Devasahayam Woodmere, NY

Emmanuel Lakios Mt. Sinai, NY

Emmanuuel Lakios Mt. Sinai, NY

Attorneys & Agents of Record

JAY DURST Reg. 41723 Attorney · BOYLE FREDRICKSON, S.C.

KEITH BAXTER Reg. 31233 Attorney · BOYLE FREDRICKSON, S.C.

ADAM BROOKMAN Reg. 32401 Agent · BOYLE FREDRICKSON, S.C.

JAMES BOYLE Reg. 33653 Attorney · BOYLE FREDRICKSON, S.C.

TIMOTHY NEWHOLM Reg. 34400 Attorney · BOYLE FREDRICKSON, S.C.

LAWRENCE CROWE Reg. 35110 Attorney · LAWRENCE E. CROWE, LLC

PETER STOMMA Reg. 36020 Attorney · BOYLE FREDRICKSON, S.C.

MICHAEL GRATZ Reg. 39693 Attorney · BOYLE FREDRICKSON, S.C.

DAVID STEIN Reg. 40828 Attorney · BOYLE FREDRICKSON, S.C.

MATHEW CORR Reg. 45434 Attorney · BOYLE FREDRICKSON, S.C.

TED BARTHEL Reg. 48769 Attorney · BOYLE FREDRICKSON SC

MICHAEL BRAYER Reg. 51495 Attorney · BOYLE FREDRICKSON S.C.

MICHAEL GRIGGS Reg. 52969 Attorney · BOYLE FREDRICKSON S.C.

ERIC LALOR Reg. 54631 Attorney · BOYLE FREDRICKSON, S.C.

KIRK DEHECK Reg. 55782 Attorney · BOYLE FREDRICKSON. S.C.

PETER CESARZ Reg. 61190 Attorney · BOYLE FREDRICKSON

ERIC SCHLEVENSKY Reg. 65552 Attorney · BOYLE FREDRICKSON, S.C.

KYLE COSTELLO Reg. 68700 Attorney · BOYLE FREDRICKSON, S. C.

MITCHELL STOCK Reg. 72468 Attorney · BOYLE FREDRICKSON, S.C.

MARRIAM LIN Reg. 76161 Attorney · HUSCH BLACKWELL

Prosecution

No recorded assignments were found for this patent.

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