Patent Application
Provisional
App. No. 60/293,092
· Confirmation No. 2389
Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants
Provisional Application Expired
Inventors
Satyadev R. Patel
Elk Grove, CA
Andrew G. Huibers
Mountain View, CA
Gregory P. Schaadt
Santa Clara, CA
Peter J. Heureux
Felton, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- P17-Pro
- Confirmation No.
- 2389
Child
PCT
Claims priority from a provisional application
→
PCT/US2002/016224
Filed 2002-05-22
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
Claims priority from a provisional application
→
App. 10/922,565
Filed 2004-08-19
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 10/154,150
· US 6,800,210
Filed 2002-05-22
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-01-02
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Quick Facts
- App. No.
- 60/293,092
- Filed
- 2001-05-22
External Links