IP Library › Patent Application 60305226
Patent Application Provisional
App. No. 60/305,226 · Confirmation No. 2445

Method and aparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measuring system

Inventor: Andrey Vertikov
Provisional Application Expired
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 Code Description Pages PDF
2001-07-13 TRNA Transmittal of New Application 1 View
2001-07-13 SPEC Specification 16 View
2001-07-13 ABST Abstract 1 View
2001-07-13 DRW Drawings-only black and white line drawings 6 View
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Quick Facts
App. No.
60/305,226
Filed
2001-07-13