Chemical-mechanical polishing system having aspirator drawn pneumatics

Inventors: Mary K. Nicholes, Steve Carlson, Mark Litchy

Provisional Application Expired

	Code	Description	Pages	PDF
2001-08-17	`TRNA`	Transmittal of New Application	1	View
2001-08-17	`SPEC`	Specification	15	View
2001-08-17	`CLM`	Claims	6	View
2001-08-17	`ABST`	Abstract	1	View
2001-08-17	`DRW`	Drawings-only black and white line drawings	23	View
2001-08-17	`LET.`	Miscellaneous Incoming Letter	8	View

Inventors

Mary K. Nicholes Chaska, MN

Steve Carlson Chaska, MN

Mark Litchy Plymouth, MN

Attorneys & Agents of Record

MARK MURPHY Reg. 34225 Attorney · HUSCHBLACKWELL LLP

THOMAS MILLER Reg. 36871 Attorney

RACHAEL LEVENTHAL Reg. 54266 Attorney · HUSCH BLACKWELL LLP

DANIEL COHN Reg. 57476 Attorney · BLACKWELL SANDERS,LLP

MICHAEL CRONIN Reg. 61196 Agent · HUSCH BLACKWELL LLP

S. DILL Reg. 71656 Attorney · HUSCH BLACKWELL LLP

BRIAN MARSTALL Reg. 73023 Attorney · MICHAEL BEST & FRIEDRICH LLP

MAX ELLENBECKER Reg. 75757 Attorney · HUSCH BLACKWELL LLP

BRIAN LANING Reg. 77345 Attorney · HUSCH BLACKWELL LLP

SYDNEY FORSANDER Reg. 81199 Attorney · HUSCH BLACKWELL LLP

Prosecution

No recorded assignments were found for this patent.

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