IP Library › Patent Application 60316317
Patent Application Provisional
App. No. 60/316,317 · Confirmation No. 8569

Test structures and models for estimating the yield impact of dishing and/or voids

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2001-08-31 TRNA Transmittal of New Application 3 View
2001-08-31 SPEC Specification 8 View
2001-08-31 CLM Claims 2 View
2001-08-31 DRW Drawings-only black and white line drawings 26 View
2001-08-31 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
60/316,317
Filed
2001-08-31