Additives to enhance polish rates in CMP slurries

Provisional Application Expired

	Code	Description	Pages	PDF
2001-08-31	`TRNA`	Transmittal of New Application	2	View
2001-08-31	`SPEC`	Specification	7	View
2001-08-31	`CLM`	Claims	3	View
2001-08-31	`LET.`	Miscellaneous Incoming Letter	1	View

Inventors

Michael T. Brigham Charlotte, VT

Donald F. Canaperi Bridgewater, CT

Michael A. Cobb Yorktown Heights, NY

William Cote Poughkeepsie, NY

Kenneth M. Davis Newburgh, NY

Scott Estes Essex Junction, VT

Edward J. Gordon Bristol, VT

James Hannah Hopewell Junction, NY

Mahadevaiyer Krishnan Hopewell Junction, NY

Michael F. Lofaro Marlboro, NY

Michael J. MacDonald Yorktown Heights, NY

James A. Tornello Cortlandt Manor, NY

Dean Schaffer Essex Junction, VT

George J. Slusser Milton, VT

Eric J. White Charlotte, VT

Attorneys & Agents of Record

ROBERT TREPP Reg. 25933 Attorney · ROBERT M TREPP

Prosecution

No recorded assignments were found for this patent.

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