IP Library › Patent Application 60327025
Patent Application Provisional
App. No. 60/327,025 · Confirmation No. 1274

Chemical mechanical polishing of conductive layers

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2001-10-03 TRNA Transmittal of New Application 2 View
2001-10-03 SPEC Specification 10 View
2001-10-03 DRW Drawings-only black and white line drawings 4 View
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Quick Facts
App. No.
60/327,025
Filed
2001-10-03