Patent Application
Provisional
App. No. 60/329,758
· Confirmation No. 4922
Advanced Illumination system for use in microlithography
Provisional Application Expired
Inventors
Mark Oskotsky
Mamaroneck, NY
Lev Ryzhikov
Norwalk, CT
Scott Coston
New Milford, CT
James Tsacoyeanes
Southbury, CT
Peter J. Baumgartner
Bethel, CT
Walter Augustyn
Monroe, CT
Attorneys & Agents of Record
Prosecution
- Customer No.
- 26111
- Docket No.
- 1857.0700000
- Confirmation No.
- 4922
Child
Claims priority from a provisional application
→
App. 11/335,599
· US 7,158,307
Filed 2006-01-20
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 10/812,978
· US 7,079,321
Filed 2004-03-31
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 10/270,556
· US 6,775,069
Filed 2002-10-16
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/808,436
· US 7,006,295
Filed 2004-03-25
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
from
AUGUSTYN, WALTER,
BAUMGARTNER, PETER,
OSKOTSKY, MARK,
RYZHIKOV, LEV,
TSACOYEANES, JAMES,
COSTON, SCOTT
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-01-04
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 60/329,758
- Filed
- 2001-10-18
External Links