Patent Application
Provisional
App. No. 60/336,812
· Confirmation No. 6969
Articulated MEMS electrostatic rotary actuator
Provisional Application Expired
Inventors
Edward Arthur Hill
Chapel Hill, NC
Ramaswamy Mahadevan
Chapel Hill, NC
Vijayakumar R. Dhuler
Raleigh, NC
Robert L. Wood
Cary, NC
Attorneys & Agents of Record
Prosecution
- Customer No.
- 27975
- Docket No.
- CRO-67 US PROV
- Confirmation No.
- 6969
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/336,812
- Filed
- 2001-12-05
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