Patent Application
Provisional
Small
App. No. 60/340,677
· Confirmation No. 8850
Method for fabricating vertically self-aligned electrically-isolated MEMS comb-drive actuator
Provisional Application Expired
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 31644
- Docket No.
- 1063 USA
- Confirmation No.
- 8850
Child
Claims priority from a provisional application
→
App. 10/189,234
Filed 2002-07-02
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 12/930,840
· US 8,691,099
Filed 2011-01-18
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 10/190,083
Filed 2002-07-02
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 10/191,041
Filed 2002-07-02
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 10/319,403
· US 7,872,394
Filed 2002-12-12
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/340,677
- Filed
- 2001-12-13
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