IP Library › Patent Application 60347491
Patent Application Provisional
App. No. 60/347,491 · Confirmation No. 7150

Thick homogeneous fixed abrasive pad for CMP

Inventor: Sumant Kamboj
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2002-01-10 TRNA Transmittal of New Application 2 View
2002-01-10 ADS Application Data Sheet 1 View
2002-01-10 SPEC Specification 11 View
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Quick Facts
App. No.
60/347,491
Filed
2002-01-10