IP Library Patent Application 60373487
Patent Application Provisional Small
App. No. 60/373,487 · Confirmation No. 1209

Scatterometric measurement of undercut diffraction grating structures

Inventor: Michael E. Littau
Provisional Application Expired
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Code Description Pages PDF
2002-04-17 TRNA Transmittal of New Application 2 View
2002-04-17 ADS Application Data Sheet 1 View
2002-04-17 SPEC Specification 5 View
2002-04-17 DRW Drawings-only black and white line drawings 3 View
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Quick Facts
App. No.
60/373,487
Filed
2002-04-17