Patent Application
Provisional
Small
App. No. 60/373,487
· Confirmation No. 1209
Scatterometric measurement of undercut diffraction grating structures
Inventor:
Michael E. Littau
Provisional Application Expired
Inventors
Michael E. Littau
Albuquerque, NM
Attorneys & Agents of Record
Prosecution
- Customer No.
- 5179
- Docket No.
- 31162-11
- Confirmation No.
- 1209
from
COMERICA BANK
RELEASE OF SECURITY INTEREST
Recorded 2006-08-09
SECURITY AGREEMENT
Recorded 2003-03-18
from
LITTAU, MICHAEL E.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-03-04
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 60/373,487
- Filed
- 2002-04-17
External Links