IP Library › Patent Application 60380385
Patent Application Provisional
App. No. 60/380,385 · Confirmation No. 5998

Method and apparatus for sputter deposition

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2002-05-14 TRNA Transmittal of New Application 2 View
2002-05-14 SPEC Specification 23 View
2002-05-14 CLM Claims 11 View
2002-05-14 ABST Abstract 1 View
2002-05-14 DRW Drawings-only black and white line drawings 9 View
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Quick Facts
App. No.
60/380,385
Filed
2002-05-14