Patent Application
Provisional
Small
App. No. 60/392,271
· Confirmation No. 1166
Cluster beam ion implantation using negative ions
Provisional Application Expired
Inventors
Thomas N. Horsky
Boxborough, MA
Dale C. Jacobson
Allamuchy, NJ
Attorneys & Agents of Record
Prosecution
- Docket No.
- 11843/26
- Confirmation No.
- 1166
Child
Claims priority from a provisional application
→
App. 11/647,922
· US 7,994,031
Filed 2006-12-29
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
PCT
Claims priority from a provisional application
→
PCT/US2003/017839
Filed 2003-06-06
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 10/251,491
Filed 2002-09-20
· Abandoned -- After Examiner's Answer or Board of Appeals Decision
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/392,271
- Filed
- 2002-06-26
External Links