IP Library Patent Application 60397895
Patent Application Provisional
App. No. 60/397,895 · Confirmation No. 2624

Substrate processing apparatus

Provisional Application Expired
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Code Description Pages PDF
2002-07-22 TRNA Transmittal of New Application 2 View
2002-07-22 SPEC Specification 21 View
2002-07-22 CLM Claims 1 View
2002-07-22 DRW Drawings-only black and white line drawings 9 View
2002-07-22 LET. Miscellaneous Incoming Letter 13 View
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Quick Facts
App. No.
60/397,895
Filed
2002-07-22