IP Library Patent Application 60420371
Patent Application Provisional Small
App. No. 60/420,371 · Confirmation No. 6967

Corrosion retarding polishing slurry for the chemical mechanical polishing of copper surfaces

Inventor: Yaw S. Obeng
Provisional Application Expired
⬇ PDF
Code Description Pages PDF
2007-08-16 LET. Miscellaneous Incoming Letter 14 View
2002-10-22 TRNA Transmittal of New Application 1 View
2002-10-22 SPEC Specification 11 View
2002-10-22 DRW Drawings-only black and white line drawings 1 View
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Quick Facts
App. No.
60/420,371
Filed
2002-10-22