IP Library › Patent Application 60422314
Patent Application Provisional
App. No. 60/422,314 · Confirmation No. 8644

Method of planarizing wafer topology using CMP

Inventors: Amitay Levi, Gian Sharma
Provisional Application Expired
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 Code Description Pages PDF
2002-10-29 TRNA Transmittal of New Application 3 View
2002-10-29 SPEC Specification 3 View
2002-10-29 DRW Drawings-only black and white line drawings 30 View
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Quick Facts
App. No.
60/422,314
Filed
2002-10-29