IP Library Patent Application 60431192
Patent Application Provisional
App. No. 60/431,192 · Confirmation No. 6252

Sputter coating apparatus including ion beam source(s), and corresponding method

Inventor: Scott V. Thomsen
Provisional Application Expired
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Code Description Pages PDF
2002-12-06 TRNA Transmittal of New Application 1 View
2002-12-06 SPEC Specification 14 View
2002-12-06 CLM Claims 4 View
2002-12-06 ABST Abstract 1 View
2002-12-06 DRW Drawings-only black and white line drawings 12 View
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Quick Facts
App. No.
60/431,192
Filed
2002-12-06