IP Library › Patent Application 60432358
Patent Application Provisional
App. No. 60/432,358 · Confirmation No. 3165

Composition and associated method for oxide chemical mechanical planarization

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2002-12-09 TRNA Transmittal of New Application 1 View
2002-12-09 SPEC Specification 12 View
2002-12-09 CLM Claims 1 View
2002-12-09 ABST Abstract 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
60/432,358
Filed
2002-12-09