Methods and apparatus for remote plasma cleaning with improved gas delivery lid assemblies

Inventors: Gi Y. Kim, Marbert G. Moore, Adrian Jansz, David K. Foote, Richard L. Hendrickson, Ken Doering

Provisional Application Expired

	Code	Description	Pages	PDF
2002-12-18	`TRNA`	Transmittal of New Application	2	View
2002-12-18	`SPEC`	Specification	10	View
2002-12-18	`DRW`	Drawings-only black and white line drawings	4	View

Inventors

Gi Y. Kim Sunnyvale, CA

Marbert G. Moore Sunnyvale, CA

Adrian Jansz Sunnyvale, CA

David K. Foote Sunnyvale, CA

Richard L. Hendrickson Sunnyvale, CA

Ken Doering Sunnyvale, CA

Attorneys & Agents of Record

UM PING ENG Reg. 39666 Attorney · WILSON SONSINI GOODRICH AND ROSATI

Prosecution

No recorded assignments were found for this patent.

Monitor This Case

Get email alerts when status or documents change.

Order Certified Copies

Most orders are placed with the USPTO same day — all within 24 business hours.

Pre-filled with this application's details

Quick Facts

External Links