Patent Application
Provisional
Small
App. No. 60/437,647
· Confirmation No. 5549
Method and apparatus for generating a membrane target for laser produced plasma
Provisional Application Expired
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23562
- Docket No.
- 67411811.1093
- Confirmation No.
- 5549
Child
PCT
Claims priority from a provisional application
→
PCT/US2003/041694
Filed 2003-12-31
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 10/750,022
· US 6,977,383
Filed 2003-12-31
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
from
JMAR, LLC
INTELLECTUAL PROPERTY SECURITY AGREEMENT
Recorded 2009-05-11
from
JMAR RESEARCH, INC., A CALIFORNIA CORPORATION,
JMAR TECHNOLOGIES, INC., A DELAWARE CORPORATION,
JMAR/SAL NANOLITHOGRAPHY, INC., A CALIFORNIA CORPORATION,
JSI MICROELECTRONICS, INC., A CALIFORNIA CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2009-05-07
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Quick Facts
- App. No.
- 60/437,647
- Filed
- 2003-01-02
External Links