Patent Application
Provisional
App. No. 60/437,826
· Confirmation No. 6479
Composition and method used for chemical mechanical planarization of metals
Provisional Application Expired
Inventors
Song Y. Chang
Dublin, OH
Mark Evans
Gallipolis, OH
Dnyanesh Tamboli
Dublin, OH
Stephen W. Hymes
Austin, TX
Attorneys & Agents of Record
Prosecution
- Docket No.
- AOI-66
- Confirmation No.
- 6479
Child
Claims priority from a provisional application
→
App. 10/744,285
Filed 2003-12-23
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 12/213,141
Filed 2008-06-16
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 14/947,711
· US 10,373,842
Filed 2015-11-20
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2003/041291
Filed 2003-12-29
· RO PROCESSING COMPLETED-PLACED IN STORAGE
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/437,826
- Filed
- 2003-01-03
External Links