IP Library › Patent Application 60468264
Patent Application Provisional
App. No. 60/468,264 · Confirmation No. 2852

Masks for improved sputter deposition uniformity on non-planar substrates

Provisional Application Expired
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 Code Description Pages PDF
2003-05-07 TRNA Transmittal of New Application 1 View
2003-05-07 SPEC Specification 11 View
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Quick Facts
App. No.
60/468,264
Filed
2003-05-07