Patent Application
Provisional
Small
App. No. 60/469,449
· Confirmation No. 9281
Whole-substrate spectral imaging system for CMP
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-10-03 | CFILE |
Request for Corrected Filing Receipt | 2 | View | |
| 2003-09-30 | CFILE |
Request for Corrected Filing Receipt | 7 | View | |
| 2003-05-05 | TRNA |
Transmittal of New Application | 4 | View | |
| 2003-05-05 | SPEC |
Specification | 36 | View | |
| 2003-05-05 | CLM |
Claims | 7 | View | |
| 2003-05-05 | ABST |
Abstract | 1 | View | |
| 2003-05-05 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2003-05-05 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Docket No.
- 02578.0009.PZUS00
- Confirmation No.
- 9281
Child
PCT
Claims priority from a provisional application
→
PCT/US2004/010326
Filed 2004-04-01
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
Claims priority from a provisional application
→
App. 10/815,555
Filed 2004-04-01
· Abandoned -- Failure to Respond to an Office Action
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-12-04
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Quick Facts
- App. No.
- 60/469,449
- Filed
- 2003-05-05
External Links