IP Library Patent Application 60480338
Patent Application Provisional
App. No. 60/480,338 · Confirmation No. 7882

Plasma production device and method and RF driver

Inventor: Patrick A. Pribyl
Provisional Application Expired
⬇ PDF
Code Description Pages PDF
2003-06-19 TRNA Transmittal of New Application 1 View
2003-06-19 WFEE Fee Worksheet (SB06) 1 View
2003-06-19 SPEC Specification 13 View
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Quick Facts
App. No.
60/480,338
Filed
2003-06-19