IP Library › Patent Application 60493686
Patent Application Provisional
App. No. 60/493,686 · Confirmation No. 3986

Plasma etching using dibromethane addition

Inventor: Lyle T. Leverich
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2003-09-25 A.PE Preliminary Amendment 1 View
2003-09-25 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-09-25 OATH Oath or Declaration filed 1 View
2003-09-25 LET. Miscellaneous Incoming Letter 1 View
2003-08-07 TRNA Transmittal of New Application 2 View
2003-08-07 SPEC Specification 7 View
2003-08-07 CLM Claims 2 View
2003-08-07 ABST Abstract 1 View
2003-08-07 DRW Drawings-only black and white line drawings 1 View
2003-08-07 OATH Oath or Declaration filed 1 View
2003-08-07 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/493,686
Filed
2003-08-07