IP Library Patent Application 60494955
Patent Application Provisional
App. No. 60/494,955 · Confirmation No. 7424

Periodic acid compositions for polishing ruthenium substrates

Inventor: Robert J. Small
Provisional Application Expired
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Code Description Pages PDF
2004-05-17 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-04-20 PA.. Power of Attorney 6 View
2003-08-14 TRNA Transmittal of New Application 1 View
2003-08-14 SPEC Specification 24 View
2003-08-14 CLM Claims 2 View
2003-08-14 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/494,955
Filed
2003-08-14