Patent Application
Provisional
App. No. 60/509,248
· Confirmation No. 5700
Feedforward control methods for reactive sputtering
Provisional Application Expired
Inventors
Mark George
Santa Rosa, CA
Evan Craves
Santa Rosa, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- DEP05 1003
- Confirmation No.
- 5700
Child
PCT
Claims priority from a provisional application
→
PCT/US2004/033389
Filed 2004-10-08
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
Claims priority from a provisional application
→
App. 10/960,621
· US 7,232,506
Filed 2004-10-08
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
RELEASE OF SECURITY INTEREST
Recorded 2007-06-06
SECURITY AGREEMENT
Recorded 2003-12-30
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Quick Facts
- App. No.
- 60/509,248
- Filed
- 2003-10-08
External Links