IP Library › Patent Application 60538832
Patent Application Provisional
App. No. 60/538,832 · Confirmation No. 8611

Cleaning CVD chambers following deposition of porogen-containing materials

Provisional Application Expired
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 Code Description Pages PDF
2004-01-23 TRNA Transmittal of New Application 2 View
2004-01-23 SPEC Specification 12 View
2004-01-23 CLM Claims 5 View
2004-01-23 ABST Abstract 1 View
2004-01-23 DRW Drawings-only black and white line drawings 5 View
2004-01-23 ARTIFACT Artifact sheet indicating an item has been filed which cannot be scanned 1 View
2004-01-23 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/538,832
Filed
2004-01-23