Patent Application
Provisional
Small
App. No. 60/548,239
· Confirmation No. 6589
System for electrochemical mechanical polishing
Provisional Application Expired
Inventors
Bulent M. Basol
Manhattan Beach, CA
Homayoun Talieh
San Jose, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- NT-318P
- Confirmation No.
- 6589
Child
Claims priority from a provisional application
→
App. 11/173,233
· US 7,648,622
Filed 2005-07-01
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 11/069,202
Filed 2005-02-28
· Abandoned -- Failure to Respond to an Office Action
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/548,239
- Filed
- 2004-02-27
External Links