IP Library › Patent Application 60554638
Patent Application Provisional
App. No. 60/554,638 · Confirmation No. 9370

Alkaline post-CMP cleaning solution

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2004-03-19 TRNA Transmittal of New Application 1 View
2004-03-19 SPEC Specification 8 View
2004-03-19 CLM Claims 1 View
2004-03-19 ABST Abstract 1 View
2004-03-19 DRW Drawings-only black and white line drawings 2 View
2004-03-19 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/554,638
Filed
2004-03-19