IP Library › Patent Application 60572198
Patent Application Provisional Small
App. No. 60/572,198 · Confirmation No. 5438

System for electrochemical mechanical polishing

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2004-05-18 TRNA Transmittal of New Application 1 View
2004-05-18 SPEC Specification 18 View
2004-05-18 DRW Drawings-only black and white line drawings 11 View
2004-05-18 WFEE Fee Worksheet (SB06) 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
60/572,198
Filed
2004-05-18