IP Library › Patent Application 60613410
Patent Application Provisional
App. No. 60/613,410 · Confirmation No. 5963

Method of selective etching of Al-containing material using etch stop layer

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2005-10-31 PET.STATUS Petition for review/processing depending on status 18 View
2004-09-27 TRNA Transmittal of New Application 2 View
2004-09-27 SPEC Specification 12 View
2004-09-27 DRW Drawings-only black and white line drawings 7 View
2004-09-27 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/613,410
Filed
2004-09-27