IP Library › Patent Application 60613411
Patent Application Provisional
App. No. 60/613,411 · Confirmation No. 5961

Method of making prestructure for MEMS systems

Provisional Application Expired
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 Code Description Pages PDF
2004-09-27 TRNA Transmittal of New Application 2 View
2004-09-27 SPEC Specification 14 View
2004-09-27 CLM Claims 1 View
2004-09-27 ABST Abstract 1 View
2004-09-27 DRW Drawings-only black and white line drawings 13 View
2004-09-27 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/613,411
Filed
2004-09-27