IP Library › Patent Application 60613423
Patent Application Provisional
App. No. 60/613,423 · Confirmation No. 5947

Method and system for xenon fluoride etching with enhanced efficiency

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2004-09-27 TRNA Transmittal of New Application 2 View
2004-09-27 SPEC Specification 19 View
2004-09-27 DRW Drawings-only black and white line drawings 13 View
2004-09-27 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/613,423
Filed
2004-09-27