IP Library Patent Application 60633061
Patent Application Provisional Small
App. No. 60/633,061 · Confirmation No. 1410

Wet etching of the edge and bevel of a silicon wafer

Provisional Application Expired
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Code Description Pages PDF
2004-12-03 TRNA Transmittal of New Application 1 View
2004-12-03 SPEC Specification 4 View
2004-12-03 CLM Claims 3 View
2004-12-03 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/633,061
Filed
2004-12-03