Patent Application
Provisional
Small
App. No. 60/659,566
· Confirmation No. 2009
Method and system for cleaning substrates with sonic energy that reduces or eliminates damage to semiconductor devices
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-05-04 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 7 | View | |
| 2005-03-25 | PEFN |
Pre-Exam Formalities Notice | 2 | View | |
| 2005-03-08 | TRNA |
Transmittal of New Application | 1 | View | |
| 2005-03-08 | SPEC |
Specification | 18 | View | |
| 2005-03-08 | CLM |
Claims | 9 | View | |
| 2005-03-08 | ABST |
Abstract | 1 | View | |
| 2005-03-08 | DRW |
Drawings-only black and white line drawings | 14 | View |
Inventors
Ismail Kashkoush
Orefield, PA
John Korbler
Mertztown, PA
Vivek Vohra
Allentown, PA
Pejman Fani
San Clemente, CA
Alan Walter
Chester Springs, PA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 34132
- Docket No.
- 108430.046
- Confirmation No.
- 2009
Child
PCT
Claims priority from a provisional application
→
PCT/US2006/008452
Filed 2006-03-08
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 11/370,707
Filed 2006-03-08
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 11/370,361
Filed 2006-03-08
· Abandoned -- Failure to Respond to an Office Action
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/659,566
- Filed
- 2005-03-08
External Links