Low-dishing composition and method for chemical-mechanical planarization with branched-alkylphenol-substituted benzotriazole

Inventors: Junaid A. Siddiqui, Timothy F. Compton

Provisional Application Expired

	Code	Description	Pages	PDF
2005-03-23	`TRNA`	Transmittal of New Application	2	View
2005-03-23	`SPEC`	Specification	32	View
2005-03-23	`CLM`	Claims	6	View
2005-03-23	`ABST`	Abstract	1	View
2005-03-23	`WFEE`	Fee Worksheet (SB06)	1	View

Inventors

Junaid A. Siddiqui Richmond, VA

Timothy F. Compton Casa Grande, AZ

Attorneys & Agents of Record

GEOFFERY CHASE Reg. 28059 Attorney

AMY CARR-TREXLER Reg. 51531 Attorney · AIR PRODUCTS AND CHEMICALS, INC.

ROBERT DIAZ Reg. 55109 Attorney · AIR PRODUCTS AND CHEMICALS, INC.

MATTHEW WEAVER Reg. 64128 Attorney · AIR PRODUCTS AND CHEMICALS, INC.

DALESIA BOYD Reg. 65561 Attorney · EDMONDS & CMAIDALKA

JASON PLOEGER Reg. 76863 Agent · AIR PRODUCTS AND CHEMICALS, INC.

Prosecution

No recorded assignments were found for this patent.

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