IP Library › Patent Application 60664930
Patent Application Provisional
App. No. 60/664,930 · Confirmation No. 7549

High-stability composition and method for chemical-mechanical planarization with low potential for metal contamination/defectivity

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2005-03-25 TRNA Transmittal of New Application 1 View
2005-03-25 SPEC Specification 24 View
2005-03-25 CLM Claims 2 View
2005-03-25 DRW Drawings-only black and white line drawings 2 View
2005-03-25 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/664,930
Filed
2005-03-25