IP Library › Patent Application 60673663
Patent Application Provisional Small
App. No. 60/673,663 · Confirmation No. 6493

Use of modeled physical parameters for real-time semiconductor process metrology applied to semiconductor processes

Provisional Application Expired
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 Code Description Pages PDF
2005-04-20 TRNA Transmittal of New Application 2 View
2005-04-20 SPEC Specification 2 View
2005-04-20 DRW Drawings-only black and white line drawings 2 View
2005-04-20 WFEE Fee Worksheet (SB06) 1 View
2005-04-20 ADS Application Data Sheet 2 View
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Quick Facts
App. No.
60/673,663
Filed
2005-04-20