IP Library › Patent Application 60698223
Patent Application Provisional
App. No. 60/698,223 · Confirmation No. 8387

Substrate transport apparatus with automated alignment

Provisional Application Expired
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 Code Description Pages PDF
2005-07-11 TRNA Transmittal of New Application 3 View
2005-07-11 SPEC Specification 31 View
2005-07-11 CLM Claims 13 View
2005-07-11 ABST Abstract 1 View
2005-07-11 DRW Drawings-only black and white line drawings 15 View
2005-07-11 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/698,223
Filed
2005-07-11