IP Library › Patent Application 60706269
Patent Application Provisional Small
App. No. 60/706,269 · Confirmation No. 1502

System and methods for measuring and analyzing lithographic parameters and determining optimal process corrections

Provisional Application Expired
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 Code Description Pages PDF
2005-08-09 TRNA Transmittal of New Application 2 View
2005-08-09 SPEC Specification 27 View
2005-08-09 DRW Drawings-only black and white line drawings 22 View
2005-08-09 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/706,269
Filed
2005-08-09