IP Library › Patent Application 60719247
Patent Application Provisional
App. No. 60/719,247 · Confirmation No. 7226

Systems and methods that mitigate contamination during ion implantation processes through the introduction of reactive gases

Provisional Application Expired
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 Code Description Pages PDF
2005-09-21 TRNA Transmittal of New Application 2 View
2005-09-21 SPEC Specification 14 View
2005-09-21 CLM Claims 2 View
2005-09-21 ABST Abstract 1 View
2005-09-21 DRW Drawings-only black and white line drawings 5 View
2005-09-21 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/719,247
Filed
2005-09-21